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Ultra High Vacuum Pump NEGLAZE

Oxygen-free Pd/Ti deposition ICF zero-length NEG pump

NEG (Non-Evaporable Getter) is a vacuum pump that utilizes getter action to evacuate and generate ultra-high vacuum. Unlike getter pumps that obtain vacuum through heating and sublimation, it adsorbs gas molecules such as hydrogen onto the surface and inside of a film formed on the inner side of vacuum components by cooling after heating. It is generally used in combination with turbo molecular pumps and others. NEG (Non-Evaporable Getter) is the action of adsorbing gas molecules onto a chemically active solid surface through getter action. It adsorbs gases such as hydrogen (H2) and carbon monoxide (CO) that are continuously released from the inner surface of vacuum vessels after baking, maintaining ultra-high vacuum. The latest compactly designed NEG has been optimized for both performance and cost while enhancing functionality, allowing customers to relatively easily create ultra-high vacuum environments for their applications. For example, it can be applied to containers, equipment, and devices (such as analytical instruments and sample storage containers) that require ultra-high vacuum environments. We have developed 'NEGLAZE' utilizing this NEG technology.

  • Vacuum pump
  • Vacuum Equipment
  • High vacuum pump

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